WEEK 4 TASK 9 compare results with results of other groups
In the high-k gate stacks, the more Hf contains, the higher oxide relative permittivity, the thinner equivalent oxide thickness, the more negative oxide charge density.
So that the high-k material can increase the physical thickness without increasing the electrical oxide thickness, and using high-k material to replace the transistor's silicon dioxide gate dielectric can improve circuit performance.
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